Product Development Using Multi-Physics Software

Analysis of a cooling station for semiconductor wafers illustrates the utility of COSMOS multi-physics in the design process. The analysis covers three goals:

• reduce the temperature of eighteen hot wafers below a target value of ten minutes or less.

• minimize the amount of gas used for convective cooling in a cooling chamber that holds a commercially available, multi-axis robot that loads and unloads wafers through a standard interface port.

• create a manufacturable system. More>>

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Xcitex at NI Week 2008

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